@Article{FragaCoSaBaPeTr:2018:AdPrUl,
author = "Fraga, Mariana Amorim and Contin, Andre and Savonov, Graziela da
Silva and Barbosa Gavinier, Divani and Pessoa, Rodrigo S. and
Trava-Airoldi, Vladimir Jesus",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {} and
{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {} and {Instituto
Nacional de Pesquisas Espaciais (INPE)}",
title = "Addressing the properties of ultranano- and microcrystalline CVD
diamond films grown on 4H-SiC substrates",
journal = "Materials Science Forum",
year = "2018",
volume = "924",
pages = "927--930",
abstract = "he growth of diamond films on different substrates has been
studied extensively to support the emerging technologies ranging
from mechanical to nano/microelectronics. It is known that the
performance of these applications is affected by diamond film
properties, such as structure and morphology. Using chemical vapor
deposition (CVD) technique, we have deposited ultrananocrystalline
diamond (UNCD) and microcrystalline diamond (MCD) films on 4H-SiC
substrates and investigated their basic material properties. The
understanding and exploitation of the material properties are
fundamental to evaluate the potential of UNCD-on-SiC and
MCD-on-SiC structures for fabrication of electronic devices and
sensors.",
issn = "0255-5476",
label = "lattes: 9056523421868704 3 FragaCoSaBaPeAi:2018:AdPrUl",
language = "en",
targetfile = "fraga_adressing.pdf",
url = "https://doi.org/10.4028/www.scientific.net/MSF.924.927",
urlaccessdate = "27 abr. 2024"
}